Vacuum systems

 

116  ) VACUUM SYSTEM COMPONENTS MISC.

Edwards EO69-00-209 Top plate for etch accessory on model 306 Coater (Item No. 105)                         Used

117  ) VACUUM SYSTEMS-Cryo Pumped.

24" Web Coater tooled for filament evaporation on lead frames.  Approx 6' dia x 4' lg.   SST chamber       Good                                $65,000

for 20" ASA cryopump.  Stokes 1721 blower package. Arctic AC-5, 5 ton A/C chiller. (Item No. 174)

 

MRC-Sputtering system, custom built for seagate for hard disks coating. GP 275 Pirani gauge.                 Good Used                       $9,500

              CTI-8 cryo pump, 6"VRC main valve, 6" throttling valve, MRC 2kw

RF power supply & matching box, 3 target, 19 ¼” id x 6 ½” horizontal SST chamber, no comp, 

MP, or I.G. (Item No. 4503)

             

              HVEC 38”WX36”DX66”H SST W/C box, front opening door. 20” ASA poppet valve w/baffle

              In plenum. No pumps or controls. Unit had CTI-500 cryo. Varian HS-20 also available                                    As-Is                       $30,000

       

 

  118 )   VACUUM  SYSTEMS – Diffusion Pumped.

         

           Balzers BAK-760 36”hx 35” w x 37 1 ½ d , SST w/c box. 2 ea 4” VP in full opening door. ISO-250 port           As-Is                       $27,000

           on top w/ rotating planetary FT, 4 ea 32mm ports on top, 2 ea on sides and 27 eaon bottom. 18 blanked off

           , 3 H.V. FT, 2 water and air FT. One substrate heater on each side. Waterbaffle in pump port. No control

           console with system but a 2 Bay Balzers cabinet is available. PVA-500-p2 w/c SST Poppet valve. EVA-

           100 P. Fore and rough valves. BFA- 500 MF water baffle, Diff-500 ISO-500 DP 230/400V. 7200W, 3ph.

           WKP-500 A blower. 588 m 3/ H 2.2 KW 230/400 V. UNO-100 MP, 100m 3/ H, 4 KW 220/380V 1ea

           3KVA and 2 ea 5 KVA transformers. Some control boxes.

         

           Balzers BAK-1050 41 ¼” H x 41 ½  w x 55 “ D, SST W/C Box. ISO-320 portin top and 2 in bottom.                As- Is                      $37,500                        

Each bottom flg has 10 ea 32mm holes in it. Also, there are 36 ea 32 mm holes in bottom. 1 ea ISO-160

Port in each side. 4 ea 32 mm holes in rear. Chamber was stripped for a rebuild. Some rust and rain damage

But can be rebuilt. No control console. PVA-630-P2 ISO-630 W/C SST poppet valve with ISO-160 rough

Port, 2 ea KF-40 and 1 ea KF-16 ports. PFA-630 A water baffle- No refrig unit, Diff-630 A ISO-630 D.P.

380V 3ph 10,500 VA. WKP-1000 blower 380V. Uno-170 MP. 380V. ISO-160 poppet valve, some piping

and control boxes.

          

 

           Quintronix•Toll Free (800) 448-2123•Fax(510) 786-4592•website http://www.quintronix.com•email dale@quintronix.com           Page 64


 

Item                                                                                                                                                                 Condition                       Price 

 

1”CVC-VMF-11, AIR COOLED DP W/ 3/8 STAINLESS quick connects on in & out, 220V                          As Is                         $350  

(item no. 4450)   

 

1”CVC-VMF-10,air cooled dp w/ ½ inch foreline valve, w/ a 1” ASA lever valve. (item no. 4449)                  As Is                         $275       

 

1” Vacuum B pumping station. CVC VMF-DP A/C W/ fan. Welch 1400 PMBG , VAT NW-25 Al                 As Is                         $1,250 Manual gate valve & ASCO ½” sol fore valve (item no. 7)

 

 Temescal 5’dx6’lg STL w/c chamber. Two NRC HS-16 DP                                                                                As Is                       $37,520 

 

CHA SE600 frame w/6”ASA SST valve&LN trap. No pumps, sidepanel, hoist, controls, or gages.                    As Is                        $2,500

2ea 2kva power stats.  Has a special 6”ASAto 20” BP w/5”d x 8” hi neck. 1 Rot FT center & small 

sputter gun.                                                                                                                                                                                       

 

10" ASA Pumping Stack.  CVC PMC-10B DP, BCN-101B LN Trap.  10" gate valve, 3" Rough &             Very Good                   $11,500

fore  valves.  Cold cathode gauge.  10" ASA 900 elbow to a 18 x 18 x 30  SST chamber from a Brad

Thompson E.B. Welder mounted on a frame. VPE. (Item No. 97)

 

10" CPA 26" SST BP Coater.  CPA 10" Aluminum LN trap/valve air, 3" VRC air rough & fore                  Good                            $8,450

valves. 2 KVA Fil PS & Tap SW, CPA 8750A valve control, CPA 8810 source heater PS & 8701

substrate temp control, CPA shutter control & trap bakeout, GP 260 ion gauge. (Item No. 95)

 

2” Denton DV-502 manual fil. Evap. 12” x 12” BJ & guard, disch. Gauge, welch 1402 MP, LN                Rebuilt                           $6,500

trap, 2” W/C D.P.  (Item No.4756)                                                                                                                 As Is                              $4,000

 

2"  Key High Vacuum Manual portable pumping station.  2" ASA Varian HSA air cooled DP.   2"             Very Good                     $4,500

Key main valve, LN trap & 3/4" rough & fore valve: Alcatel 2008A 7 CFM MP and G-P 260016

ion/thermogauge. (Item No. 15)

 

2" Key high vacuum, #P2AC-BM Manual, pumping station.2" asa air cooled dp, 2" main valve, ln              Good                              $2,250

trap, 3/4 rough and fore valve. 3/4" IG. (Item No. 4451)

 

2"ASA Varian pumping stack. M2 DP, 951-5204 SST gate valve, bellow air w/ sol (Item No. 13)              Unused                          $1,500

3" Veeco VS-300 single lever manual pumping station.  L N trap.  3" Air cooled  DP.  Welch 1402             Good Used                    $5,000

(5.6 CFM) M.P.  ION/2 position TC gauge control.115V, 1 ph, 14 A (Item No. 19)

 

4" ASA CVC PSE-43 Manual Pumping System.  VCS-41 main valve.  BC-41 multi-coolant baffle,         As Is                                 $2,750

PMC-4B DP, Welch 1397 17 CFM MP.  No gaging.  Rebuilt by Exolon. (Item No. 23)

 

4" Commonwealth scientific, DP stack, 4"ASA pump, butterfly valve,                                                        Very Good                       $1,350

Ln2 trap, 1" IG port, Varian 531 Thermo couple  gauge. (Item No. 4518)

 

4" CVC Manual System. 19" SST BP. No FT holes, (3) Eight pin FT soldered in BP; 3/4 IG port.            As Is                                 $2,750

VCS-41A solid body main valve 1 1/8 Fore & Rough valves and 1 1/2 "   BJ and Gard. Counterbal

Hoist but only weight. Circuit breaker panel, No gaging or MP (Item No. 27)

 

4" Kinney PW 400 system.  18" SST BP, 15"BJ, Cold trap & 4" DP. 5 H.V. FT. (Item No. 31)               As Is                                 $1,500

4" Mfg unknown sputtering system, 4" cvc pmc-4b dp, throttle valve,                                                         As Is                                 $4,500

Cvc bc41 multi cooled baffle, vcs-41 gate valve, 18x18 jar 1397 pump. (Item No. 4453)

 

4" Pumping stack, CVC MCF-300 DP.  VRC 4" lever valve, water baffle, top spool w/flanges. (Item      As Is                                 $475

No. 21)

 

4" Veeco VE-401 manual pumping station in homemade frame. W/controls.  4" SST W/C  DP and  LN As Is                                   $1,500

 trap.  Brass bellow Fore, rough & BTA valves.  38 w x 33d x 35h. (Item No. 40)

 

4", Mfg unk, manual, BJ system, no hoist.  24" Sq. Alum BP w/4" pump port. No FT holes.  Angle        As Is                                 $2,750

iron/Alum frame.  4" ASA x 8"h SST roughing spool w/ion/TC ports, 4" ASA Temescal split body alum gate valve.  4" ASA D & W SST  LN trap.  4" ASA Varian VHS-4  (Item No. 33)

 

6 " Varian 3117 Auto EB Evap. 24x30 SST B.J. w/ 2" & 5 " V.P. 6 " ASA FLG on top . Motor Hoist,   As Is                                 $15,500

 27 " SST BP, 6" Alum. solid body, Air Gate, 0316-6 Ln Trap & VHS - 6 DP.  Manual sw controls ,

2KVA Variac . DYN. Optics 580D Optical Monitor w / head, 2 HV , ROT ,w / c F.T. Welch 1397

MP .No EB Gun or P.S. (Item No. 4543)

 

6 " Veeco 776 , 20 " BP , 18x29 " BJ & Gard w/C' Bal Hoist , Ln Trap & DP . 1397 MP . Manual          Good Used                       $9,500

Valves. RG-83 IG & TG-7 TC gauges. 2 KVA Fil PS w/ Variac & 2 FT Patch Cord. (Item No. 4541)

 

 

Quintronix•Toll Free (800) 448-2123•Fax(510) 786-4592•website http://www.quintronix.com•email dale@quintronix.com      Page 65


 

Item                                                                                                                                                              Condition                       Price

6" ASA manual stack, 22 1/2" OD x 14 1/2" ID SST BP.                                                                           As Is                                 $495

 14 1/2"d x 9"h sump.  w/LN trap & manual poppet valve. (Item No. 83)

 

6" ASA manual system. 20"OD x7"id 1"thk SST BP w/ 5 5/8" h centered neck w/ 6" ASA flange.  No   As Is                                 $1,750

 Ft holes. 1/4 FPT, 3/4 and 1" QC ports on neck. CVC VCS-61 crank gate valve.   CVC PMC-6B Diff

 pump.   1" rough and 1 5/8 foreline valve. Mounted on Aluminum fr (Item No. 48)

 

6" CHA SE-600 Frame.  20" SST  BP & manual valves.  2 KVA Fil P.S. & Tap SW.  8 hi-current FT.   As Is                                  $4,500

Varian VHS-6 DP. No BJ, Gard, hoist or gauges. (Item No. 58)

 

6" CVC 20"dx 30"h SST BJ w/ 6" V.P. Manual System. 24" Ni plated steel BP w/ 1 shutter, 2 HV         As Is                                 $2,950

and  3 Hi current FT. W/C poppett valve baffle. 6"small flange DP 1 5/8 Rough & Fore valves, CB

hoist. CVC GP-145 Pirani gauge & old ion gauge. (Item No. 52)

 

6" CVC 26" SST BP pumping stack.  CVC 6" solid body air valve, 2" air rough & fore valves. D&W      Very Good                       $4,950

SST LN trap.  CVC PMCS-6B DP.  Perf. Angle Frame.  No Controls. (Item No. 85)

 

6" CVC AST-400 Sputtering Module.  Previously used for Plasmavac 400 sputtering system. No            As Is                                 $6,250

power supplies or tooling.  15 1/2 ID x 36" LG. (Item No. 50)

 

6" CVC Automatic system. 24"dx 32"h SST BJ w/ 2 4" VP (No glass), 26" SST BP w/ 5 FT,  24"d x    As Is                                 $9,500

6 1/4"H SST collar w/ (10) 4" OD ports. 4 Blanks. VCS-63A main valve, BC-61 multicool baffle. PMC -6B Diff pump. 2" Fore and Rough valves. Innotec Cryomeiser LN (Item No. 63)

 

6" CVC CV-18 Coater.  18" Guard & motor hoist.  20" SST B.P.  Manual valves.  BCN-61 LN trap.       As Is                                 $6,275

PMC-6  D.P.  GPH-100 Discharge gauge.  2 KVA Filament P.S. and Dual tap S.W.  No B.J., M.P. or main valve operator (Item No. 65)

 

6" CVC CV-18 Coater.  18"x 30" BJ with Guard & motor hoist.  20" SST B.P. Auto valves and              As Is                                 $7,500

switch control  BCN-61 LN trap. PMC-6B  D.P,  2 KVA Filament P.S, with tap sw., 3 400A FT, GICS-110 ion gauge/TC. (Item No. 4454)

 

6" CVC CVE-21 Manual 18 x 30 BJ Coater, 20"  SST BP, 2 KVA Fil PS.  VCS-61B Main Valve and    As Is                                $4,900

1 5/8 foreline & rough valves.  BC-61 Multicoolant  Baffle, PMC-6B DP, GIC-110 A ion/TC gauge. No BJ, gard, hoist or MP. (Item No. 67)

 

6" CVC manual coater.  26" SST BP - NO FT holes.  Center pump port, PMC-6B DP.  LN Trap  &         As Is                                 $6,000

2" Fore & rough valves.  HYD hoist.  No BJ or MP.  Was used with a sputtering module. (Item No.

87)

 

6" Edwards MK2 Diffstak 160/700 P Automatic pumping system. Two KF25 4 way collars on                Excellent                           $11,500

blanked off 8 7/8 OD NW-160 inlet.  , BRV-25 Backing/Roughing valve. LN baffle w/ side tank,

2011 auto pump cycle control w/2 PRM-10 pirani gages and ion 8 gage w/ CP-256 penning gage

 tube & vacuum map. Relay control panel and opto input unit. 208V 3 Ph 4 wire Mounted on 4’

 w x 2’d x 4 “h caster cart. No MP Manuals available. (Item No. 42)

 

6" Pumping Stack, CEC KS-200 DP.  Temescal 6" Toggle Valve, CEC baffle WB 10-02, Brass rough   As Is                   $595

valve. (Item No. 46)

 

6" Vactite Belljar system.  24"d x 33"h SST BJ W/2-5" VP & hydraulic hoist.  27" SQ SST BP.  Air       As Is                                 $8,500

operated SST 6" poppet valve & 2" foreline & roughing valves.  6" NRC HS-6 SST DP & water baffle.  Kinney KC-30, 30 CFM 2 stage MP.  2 CFM holding MP.  73"h x (Item No. 71)

 

6" Varian 3117 Auto Fil Evap. 18dx29 Cleaned but scratched BJ & Gard w/ Motor Hoist. 20 " SST        As Is                                 $12,500

BP , Air Gate , 0326-6 Ln Trap & VHS - 6 DP , 703 Valve Control & 831 Ion / TC Gate. 2 KVA Variac Fil P.S. w/ 2 400 A FT. Welch 1397 MP. (Item No. 4542)

 

6" Varian 3307-L 5045-303 cart mounted MANUAL pumping assembly.  w/ 6" Varian (VRC solid         Excellent                           $10,500

body)  #1298-K9938-336  main valve. Varian 0326-6 LN trap.  Varian VHS-6 Diff pump. Varian 843

ion/TC control.  Varian SD-700 (Alcatel 2033) 27 cfm MP (Item No. 73)

 

6" Veeco 776 Automatic coater, 20" SST BP, 18 x 30 BJ & Gard w/hoist.  LN Trap & DP.   2 KVA       As Is                                 $7,500

Fil P.S. & Tap SW.  No side panels or MP. (Item No. 81)

 

6" Veeco 776 , 20" B P , Motor Hoist 2 KVA Transformer & Dual tap switches. Few controls. No          As Is                                 $2,450

BJ Valves, Trap or pumps Orn Paint w/sidepanels. (Item No. 4540)

 

6" Veeco VE-775 20" BP, 18 x 30 BJ gard, DP,  trap, valve & hoist.  No  BJ or MP. (Item No. 77)          As Is                                $4,500

6" Veeco VE-776 20" BP, BJ Gard.  Parts missing:  No hoist, Pyrex BJ, Panels etc. (Item No. 79)           As Is                                 $1,950

CVC filament evaporator, 20" SST baseplate, motor hoist, PMC-6B DP. No bell jar or MP.                      As Is                                 $2,350

(Item No. 5041)

 

Quintronix•Toll Free (800) 448-2123•Fax(510) 786-4592•website http://www.quintronix.com•email dale@quintronix.com     Page 66


 

Item                                                                                                                                                              Condition                       Price

Ion Plating System for Titanium Nitride.  40"h x 27"w x 28"d  SST W/C chamber.  22"h upper                 As Is                                $27,000

differentially pumped chamber.  Many ports.  2 Temescal 1" rod fed guns & fil xfmrs.  Cooke 10" DP

 & Var.  VHS-6 DP w/LN Traps.  No MP.  Temescal CV-14-222 EB PS w (Item No. 93)

 

                        Titanium Nitride Coater. Mfg UKN, SSt w/c dual chamber 26 ¾ Wx 27 ½ D x 39 5/8 H overall

21 ¼ H x 26 ¾ W x 27 ½ D top chamber for TiN coating from evap, Tin & RF. 16 3/8H x 26 ¾ W x 27 ½ D

bottom chamber has 2  Varian 843 ion/tc gage. SRFH-270-1 Ti rod fed gun run by a CV-14A-220

EB PS. No MP or control console. No front door. Cham has two 0-rings                                                   As-Is                                $27,500

 

Temescal 5’ D x 6’ Lg Stl w/c chamber, 2 ea NRC HS-16 DP & poppet valves. 3 ea VP 10” bottom port

& FT ports. Balzers optical monitoring but no controls, 7.5 KVA fil supply, rotary drive for substrate

rotation, substrate heat. Glow discharge PS. 2 bay control console 47”W x 70” H. No MP                        Good                                $37,500

 

                        Varian 3125 auto sputtering system.  Three S-Guns and 2 DCPS & sw. panel.  30"d x 36"lg  (29 x 30   As Is                                 $35,000

ID)  SST w/c chamber with two full opening doors.  LN Trap-valve and VHS-250 DP.   Has RF

capability & match network but no RFPS.  Substrate heat. IC-6000, Complete (Item No. 189)

 

SST 5 way cross 48” Idx 74” deep w/ mild steel flanges, 20” CVC DP w/20” poppet. LN2 trap.             Good                                $25,000

4” poppet foreline, 4” gate roughing valves. Front roll out door, w/o controls or MP, numerous

rotary, viewport, KV and cooling feedthrus.                                                                                            

 

119  ) VACUUM SYSTEMS-Ion pumped.

P-E/Ultek RCS ion pumped SST sump w/700-055-600, no LN insert .  Top flange 21"OD x 14               Used                                 $1,250

1/2"ID.  22"h.  8-25 L/S cells, no magnets. (Item No. 4456)

 

P-E/Ultek RCS ion pumped SST sump w/700-055-600 LN insert only.  Top flange 21"OD x 14               Unused                            $1,950

1/2"ID.  22"h.  8-25 L/S cells, 13-2 3/4 CFF, 1-2 1/8 CFF. (Item No. 133)

 

Perkin Elmer 16001355 tube bakeout station. 80 lit/sec ion pump.  VAT 8" CFF manual gate valve           Good Used                       $9,750

Two LN sorbtion pump roughing w/ SST dewars.  PE #DGC III ion/TC gauge. Digital 500 ion pump

P.S. Eurotherm digital temp control. Power dist. panel. 120/208V 17A (Item No. 155)

 

Ultek 18" dia x 36"h SST chamber w/3 6" CVF VP with wire seal flg on 18" dia x 24" hi sump.  400      As Is                                 $8,500

l/s ion pump in bottom of sump.  13ea 2 3/4 and one 3 3/8 CVF flg on sump.  60-730 KreiPsman gauge control, 70-805 master power panel W/TC.  70-810 aux. contro (Item No. 147)

 

Ultek Bake station.  25 L/S pump, VT-6 TC gauge.  Parts missing. (Item No. 129)                                    As Is                                 $450

Ultek sump w/27" legs.  18"d x 17"h.  Eight 25 L/S cells w/elements no magnets, 13 CVF ports.              Used                                 $1,250

22"OD wire seal flange, Poppet valve. (Item No. 135)

 

Ultek sump w/27" legs.  18"d x 17"h.  Eight 25 L/S cells w/elements & Mag.  13 CVF ports. 22"OD       As Is                                 $1,595

wire seal flange. (Item No. 137)

 

Ultek TBK table top sump only.  12"OD x 15"h.  14 1/2"OD wire seal flange.  12 CVF ports. Two          As Is                                 $750

25 L/S IP cells. (Item No. 131)

 

Varian  UHV SST bakeable W/C BJ system W/24" Wheeler flgs.  24"d x 36"h BJ w/1-6" CFF VP &     Very Good                       $22,500

1-6" CFF blank.  24"d x 36"h sump w/20-2 3/4 CFF, 2-10" CFF & 1000 L/S diode ion pump port.

153 No hoist. (Item No. 149)

 

Varian 18"d x 27"h SST Wheeler flange sump w/10" legs, 10 CFF ports, 2 LN shroud FTs 8" CFF         As Is                                 $3,500

pump port with poppet valve seat.w/bakeout. (Item No. 139)

 

Varian 36"dia x 24"hi.  SST W/C wheeler flg. chamber.  6" hi top cover has two 2 3/4" and four 4 1/2"  As Is                                  $21,000

CFF.  18"hi sump has approx 24 ea 2 3/4 CFF and 8" CFF pump port to 912-7022 400 l/s ion pump.

 (Item No. 151)

 

Varian 931-0003 14" x 24" BJ.  Guard, hoist, 400 L/S diode, valves, vacsorbs, 921-0005 CU, TC           Very Good                       $5,500

gauge & cabinet. (Item No. 141)

 

Varian 933-0004A tube bakeout station. 8 lit/sec ion pump and 921-0062 Ion pump control.  1                 Very Good                       $4,250

Vacsorb roughing 90 valve  & 90 bakeable valve.  2 3/4 CFF pump port.. 801 TC gauge and  BTA

valve, timer & control.  19:x 21" cart w/ casters.  14"dx 17"H i.d. oven (Item No. 143)

  120  ) VACUUM SYSTEMS-Misc.

Aluminum Test/ Degassing Chamber.  19” ID x 12” hi spool. 22 7/8d x 15/16 thick. Aluminum lid.      Good                                $2,250

24” d x ¾ thick SST BP w/ 6ea ¼ ,2ea ½ , and 1 ea ¾ RL fittings brazed on bottom. Welch 1402

5.6 CFM MP, HP 6111 A 20V 1A P.S. and GP 275 convectron gage. Mounted on 24” x 36” x 37”

hi 5” caster cart.

          

              20" SST BP w/4" ID centered neck to 4" ASA VRC lever valve. 8 ea. 1" holes in BP. 1 1/8" Temescal   As Is                                  $1,650

air foil & rough valves. 4" ASA G-P 25002 LN trap. No BJ, DP or MP. 24" x 24" x 34" h caster cart

(Item No. 5072)

 

Quintronix•Toll Free (800) 448-2123•Fax(510) 786-4592•website http://www.quintronix.com•email dale@quintronix.com     Page 67


 

Item                                                                                                                                                              Condition                       Price

 

6" NRC 3177 30" BP SST, 6" ASA Centered Port, 7 1/8 Neck.  16-1" FT holes on 15 BC.electric           As Is                                 $3,000

hoist, (Item No. 91)

 

Balzers BA-350 UV UHV System with 6 " D P & 2" DP on Foreline .  No Main Valve? 14 " d x 20 "     As Is                                 $2,000

h  sump &14 " x 15 B.J. No controls Hyd Hoist & DVO-25 MP. Partly rebuilt w/ Manual! (Item No.

 4544)

Comptech in-line sputtering system for 6" dia wafers, with robot elevator (missing) into load lock             As Is                                 $24,000

transport mech. 2 heat stations and four 5" x 12" sputtering targets, Turbovac 360 on load lock and 2

CTI-8 cryopumps on chambers. Each CTI-8 has a 6" VRC valve and a 90 deg. SST 2-stage valve. No comp., or MP. 2 G-P 280 ion gauges, MDX-5K sputtering P.S. and ERA HFP-8000, 500W RF

contol & matchbox - no RF P.S. 64" h x 92" w x 38" d. (Item No. 4731)

 

COMPTECH SST Five 141/2 x 18" Chamber In Line Sputtering system.  1 1/2Hx 143/4"W                    As Is                                 $70,000

Loadlocks Four slit valves.  Two Plasmatherm HFS-2500 RF power supplies w/ Comptech match boxes.  GP-307 & 280 004 ion/TC gauge w/ (2) GP-275 pirani gauge. Varian VHS6  DP and L-H TMP-450 turbo & control.  Temescal rotary cathode & ERA 20 KW P.S. (Item No. 183)

 

LLL. 6 " Vac Syst w/o Pumps 26 " OD x 6 " ID Alum BP w/ 6 " ASA Center Prst.  6 " ASA Manual     As Is                                 $2,500

Split valve w/ rough port. 16 ea 1 " holes in BP. Motor Hoist , No BJ on Gard.  Back heater & Source

 powerstat pnls . Kronos @ QM331 DTM, FT & HD. W/ rate option . LEA 85-2807 20 ch status chassis. Circuit brkr. dist pnl. (Item No. 4545)

 

Perkin-Elmer 3400.  Load-Lock In-Line 14" Sputtering.  Pumps & parts missing. (Item No. 199)              As Is                                 $4,500

Seagate custom inline sputtering systems, Designed to sputter coat 3.75" d hard drive magnetic disks,       As Is                                 $55,000

2 CTI 8  cryo pumps, 1 Osaka 550 turbo, 2 Osaka 200 Turbo pumps on load locks. Ten  6.75" d

target rotating magnet guns, 10 MDX 5kw magnetron PS in racks.  2 Edwards E2M40 MP, 8"x17"x9' chamber, Six two sided sputtering stations, substrate heat, G-P 303 ion gauge pneumaticly operated, computer controlled user interface.  System could be converted to other uses. (Item No. 4512)

 

Vacuum/Nitrogen Backfill Cart.  Welch 1400 (.9 CFM) MP.  30 IN-0-30 PSI gauge, Reg. press tank &  Good                                  $750

 valves. (Item No. 207)

 

LBL Homemade sputtering system w/US Gun, 14”dx15”hi SST sputtering ring w/l gaskets. 18” SST BP.

 Huntington 10” CFF Manul valve. 10” CFF top& 6”ASA bot. G.P. LN Trap. Varian VHS-6 DP. Some

controls and 5CFM Precision MP, 49lx28Dx37H wooden caster frame.                                                       As Is                             $4,950

 

Varian special plasma chamber. 30dx3/4 thick alum top and bot plates. 28”dx 10” hi SST ring

w/L-gaskets and 2 ea. 6”CFF ports. No pumps, some controls. w/hoist. 28x 36x 36 hi caster cabinet        As Is                               $3,500

 

Denton Desk 1 table top sputtering for microscopic slides etc. 6” dia. X 3 ½ H BJ. Etch & sputter sw.

50Ma.meter & timer w/ mech pump                                                               As Is           $1,500                Rebuilt                           $2,750                                                    

                                                                                                                                                                         

Denton carbon Accessory for above 0-50A PS                                                                                              Good                              POR

 

Techics Planar Etch II. 12”Dia x 4” H SST chamber that hinges off BP 1 ½” VP. Vac gage,

Temp ind & timer, controls missing from bottom.                                                                                                                                 POR

 

Varian MDP-1000 Inline sputtering system for 100 & 130 mm discs. 6 positions for, etch, heat, chrome,

Colbalt , carbon & carbon. Disc turn around at end of chamber. 8 disc positioning valves, 6 gen VC2-21

MFCs. 16 Varian KF-40 valves. 7 Varian CS-8V Cryopumps w/band clamps & w/6” ASA flg.

115” Lg x 50” W x 72” H on casters. No side panels or MP. 4 Bay control console.

Call for a more complete eqpt list                                                                                                                                                          POR

 

121  ) VACUUM SYSTEMS-Thermal vac test.

23 3/4" ID x 26 " lg SST 4 " Diff pumped space chamber .  Full opening door w / STL Flags . 18 "          Good                                $9,500

ID x 24 " lg SST shroud. 4" ASA Pump port on bottom with water baffles & Varian M.4 D.P. No main valve or M.P. Ln - Heat exch. W / coolant pump . Vac map & some controls . 40 1/4 x 59 1/2 x

37 " hi Cabinet ( 74 " top ) (Item No. 4546)

6" Tenny 32" dia x 28" h SST BJ w/  spare test chamber. 6" Hi sump w/ 4" ports. Air/Hyd hoist              As Is                                 $14,500

CVC PMC-6B DP. Welch 1375 MP, Refrig comp for shrouds. tenny valve control. (Item No. 89)

 

BEMCO space chamber SST  30" id x 42" L + dished heads w/ stl flgs., Full opening door. 261/2 " id    As Is                                  $13,000

x 42"L  SST coldshroud, w/ shelf 17 1/2 below top. 10" ASA  ports on top & side, 3" ASA on rear.

10" ASA   temescal main valve,1 ½” rough foreline valves. LN trap and CVC PMC-10 DP on bot., Welch 1402 holding pump, vac map & controls, -60 to 120 F Honeywell 10" circle recorder, 50" x 73" x 55 hi cabinet (Item No. 115)

 

Quintronix•Toll Free (800) 448-2123•Fax(510) 786-4592•website http://www.quintronix.com•email dale@quintronix.com     Page 68


 

Item                                                                                                                                                              Condition                       Price

NRC 44" ID x 6'l SST water cooled space chamber, water baffle & 16" VRC SST Gate Valve.               As Is                                  $16,500

 With shroud.  2 bay control console.  Needs work. (Item

 No. 125)

 

122  ) VACUUM SYSTEMS-Turbo pumped.

Balzers-turbo pumping stand, TPU-110 pump, TCP-270 controller, G-P 260016 ion gauge, manually      Good Used                       $6,500

operated valves, 14"SST baseplate, 5 ports no MP, 40" x 24" caster cart (Item No. 4502)

 

Danielson Vector lock box VBL-12 AL. Turbo Pumped ALUM chamber.  18" H X 12" W X 13" D.      Excellent                           $7,500

 LF-100 Port out back with L-H TMP-150Turbo and NT 150/360 control.   6" wafer load lock.  9 ea

1" F.T. Holes.  Varian 801 T.C gauge. (Item No. 185)

Varian Turbo Cart Pumping Station. TV301-NAV, 969-8919 Turbo w/6” CFF and V301 Control.

SH-100 Scroll Pump, ¾ HP, 115, 1 PH. KF-25 Alum 120V Valave. Multi Gage L8350-301 with

MBA-100 Ion Gage and two 531 TC Tubes. 31”lg x 17”w x 30”hi Cart with Casters.                              Excellent                         $9,850